انواع روش های لایه نشانی

انواع روش های لایه نشانی

اسلاید 1: Seminar topic: deposition, methods and applicationsProvider: Amir Hossein Omrany amirhoseinomrany.waterloo@gmail.com EMAIL: In the name of Allah

اسلاید 2: COATING IN UHV

اسلاید 3: 4- Compare Evaporation and sputtering1- (CVD) 2-PECVD3-MOCVD Content :2-Chemical vapor deposition1-Coating system Specification3-Physical vapor depositionThermal evaporationSputteringE_Beam Gun Evaporation

اسلاید 4: Substrate FixtureMonitoringEvaporation SourcesSubstrate heatingGlow discharge unitIon Source Vacuum Chamber :Coating system Specification

اسلاید 5:

اسلاید 6:

اسلاید 7: The choice of the deposition method depends on factors such as:1- Type of material used as coating and its purity2. Layer address speed3- Substrate temperature4. The strength of the layer and its adhesion to the substrate5. Economic Considerationsdeposition methoddeposition methodPhysical vapor depositionChemical vapor deposition

اسلاید 8: CVD (Chemical vapor deposition)SiH4 (gas) + O2 (gas) SiO2 (solid) + 2H2 (gas)Ex :SiO2